| 摘要 |
<P>PROBLEM TO BE SOLVED: To protect a movable section in a sensor having the movable section in a portion of a sensor element, and simplify its manufacturing process. <P>SOLUTION: The sensor is provided with the sensor element 10 having the movable section 18, an upper lid 20 bonded so as to cover an upper surface of the sensor element 10, and a lower lid 30 bonded so as to cover a lower surface of the sensor element. A first recessed movable region 22 is formed in a region corresponding to an operating range of the movable section 18 on the upper lid 20. A second recessed movable region 32 is formed in the region corresponding to the operating range of the movable section 18 on the lower lid 30. Since the upper and lower lids 20, 30 are previously formed with the movable regions 22, 32 and bonded to the sensor element 10, the manufacturing process can be simplified. <P>COPYRIGHT: (C)2009,JPO&INPIT |
