| 摘要 |
PROBLEM TO BE SOLVED: To provide a new discrimination method and a device therefor capable of discriminating surely a nano-air bubble from other foreign matters by using an atomic force microscope. SOLUTION: Displacement of a cantilever tip when pressing a probe tip onto an inclined face of an object is measured, and when the cantilever tip is displaced to a direction wherein the probe is orthogonal to the inclined face of the object, the object is determined to be a nano-air bubble. In addition, a change with time of an object volume is measured, and when the object volume is reduced, the object is determined to be the nano-air bubble. Further, a displacement rate of the cantilever tip when pressing the probe tip onto the object is measured, and when the displacement rate is below 0.05 N/m, the object is determined to be the nano-air bubble. COPYRIGHT: (C)2009,JPO&INPIT
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