| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm type liquid conveyance device capable of accurately conveying liquid in forward and backward directions with a valveless structure without a non-return valve. SOLUTION: In a pump base 1, a recessed section is formed for constituting four pressure chambers 8<SB>1</SB>, 8<SB>2</SB>, 8<SB>3</SB>, 8<SB>4</SB>(8<SB>2</SB>, 8<SB>3</SB>not shown), and in the pressure chambers 8<SB>1</SB>, 8<SB>4</SB>, outflow/inflow ports 7<SB>1</SB>, 7<SB>2</SB>are formed, respectively. A connection is established between the pressure chambers by a flow passage (not shown), and the outflow/inflow ports 7<SB>1</SB>, 7<SB>2</SB>are communicated with each other via the pressure chambers and the flow passage. A diaphragm 2 which sandwiches seal rubbers 6 therebetween is disposed in the pump base 1, and a piezoelectric element 3 is superposed thereon. A damper rubber 5 is disposed on the central part of the piezoelectric element 3, and a pump lid 4 is firmly secured thereon. A voltage is applied onto the piezoelectric element 3, independently on each pressure chamber. COPYRIGHT: (C)2009,JPO&INPIT
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