| 摘要 |
PROBLEM TO BE SOLVED: To provide a melt leakage detection method whereby melt leakage can be instantaneously detected with high accuracy by directly detecting the melt leakage and operations such as alarming and shut-down can be promptly and securely performed, even when the melt accidentally flows out of a crucible in single crystal pulling. SOLUTION: In a single crystal pulling apparatus, a heat insulation plate 13 supported by a support member 14 is disposed at the bottom of the crucible 20, an electrode 12 that conducts electric current to a heater 11 is electrically insulated from a chamber 16, the support member 14 is electrically connected to the heat insulation plate 13 and electrically insulated from the electrode 12 and the chamber 16, and a circuit 21 for detecting electric continuity between the electrode 12, the support member 14 and the chamber 16, which are electrically insulated from each other, is established so as to detect leakage of the crystal material melt from the crucible. COPYRIGHT: (C)2009,JPO&INPIT
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