发明名称 |
Optimal Acoustic Impedance Materials for Polished Substrate Coating to Suppress Passband Ripple in BAW Resonators and Filters |
摘要 |
Methods of reducing phase and amplitude ripples in a BAW resonator frequency response by providing a substrate, fabricating a Bragg mirror having alternate layers of a high acoustic material and a low acoustic material on a first surface of the substrate, fabricating a BAW on the Bragg mirror, and coating a second side of the substrate opposite the first side with a lossy material having an acoustic impedance in the range of 0.01x to 1.0x the acoustic impedance of the layers of high impedance material, the second surface of the substrate being a polished surface. Various embodiments are disclosed. |
申请公布号 |
US2009142480(A1) |
申请公布日期 |
2009.06.04 |
申请号 |
US20070950149 |
申请日期 |
2007.12.04 |
申请人 |
MAXIM INTEGRATED PRODUCTS, INC. |
发明人 |
GODSHALK EDWARD MARTIN;LUTZ RICK D.;HANNAN MASUD;WALL RALPH N.;SRIDHAR UPPILI |
分类号 |
B05D5/12;B24B7/00 |
主分类号 |
B05D5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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