发明名称 ATOMIZER, METHOD OF ATOMIZATION, APPARATUS FOR WIRING FORMATION, AND METHOD OF WIRING FORMATION
摘要 <p>An atomizer in which the intervals of the replenishment of a solvent for material dissolution can be prolonged. The atomizer includes an atomizing part in which a material is dissolved in a solvent and the material and solvent are atomized to form a mist. The mist is discharged outward with a carrier gas introduced. The atomizer is characterized by having a solvent-replenishing part which supplies to the atomizing part a gas mixture of the carrier gas and a solvent in a vaporized state. The solvent-replenishing part has a space in which a liquid solvent is vaporized, and a carrier gas introduced from the outside is mixed with the solvent vaporized.</p>
申请公布号 WO2009069210(A1) 申请公布日期 2009.06.04
申请号 WO2007JP73048 申请日期 2007.11.29
申请人 KABUSHIKI KAISHA NIHON MICRONICS;TANAKA, KATSUMI;SHINOZAKI, KENICHI;NAKAMURA, KENTARO;NARUMI, TAKAO;OKUMURA, TETSUYA 发明人 TANAKA, KATSUMI;SHINOZAKI, KENICHI;NAKAMURA, KENTARO;NARUMI, TAKAO;OKUMURA, TETSUYA
分类号 B05B9/03;B05B17/06;C23C26/00;H05K3/10 主分类号 B05B9/03
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