SURFACE POSITION DETECTING APPARATUS, SURFACE POSITION DETECTING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To accurately detect face position information on a detected surface even if a surface other than the detected surface is present around the detected surface.

SOLUTION: A surface position detecting apparatus for detecting position information on a predetermined surface (14a) of an object invludus includes a first optical system (51E) which projects light from an oblique direction to the predetermined surface; a second optical system (52E) which receives the light from the object; a detecting system (13) which receives the light from the second optical system (52E) and detects the position information on the predetermined surface in a direction intersecting the predetermined surface based on the light; and a phase difference imparting system which is arranged in an optical path of at least one of the first and second optical systems (51E and 52E), and imparts a phase difference between different portions from each other of light traveling via a surface other than the predetermined surface of the object among the light from the second optical system (52E).

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