发明名称 Method and system for fabricating a data storage medium
摘要 Embodiments of the present invention recite a method and system for fabricating a data storage medium. In one embodiment, a detectable pattern is created at the surface of a substrate. An electron beam lithography process is then initiated upon the substrate. The detectable pattern is used to control the positioning of an electron beam relative to the surface of the substrate during the electron beam lithography process
申请公布号 US2009140175(A1) 申请公布日期 2009.06.04
申请号 US20070998715 申请日期 2007.11.30
申请人 BANDIC ZVONIMIR Z;MOSER MICHAEL A 发明人 BANDIC ZVONIMIR Z.;MOSER MICHAEL A.
分类号 G03F7/00;G21K5/04 主分类号 G03F7/00
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