| 发明名称 |
COMPOUND FOR RESIST REMOVER, AND RESIST REMOVER BY USING THE SAME |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist remover having an excellent anti-corrosion effect. SOLUTION: A compound is expressed by formulae (A) or (B). The resist remover contains at least one of the compounds expressed by formulae (A) or (B). COPYRIGHT: (C)2009,JPO&INPIT |
| 申请公布号 |
JP2009120489(A) |
申请公布日期 |
2009.06.04 |
| 申请号 |
JP20070292755 |
申请日期 |
2007.11.12 |
| 申请人 |
IDEMITSU KOSAN CO LTD |
发明人 |
MATSUO SHIGERU |
| 分类号 |
C07C69/708;C07C67/31;C11D7/26;C11D17/08;G03F7/42;H01L21/304 |
主分类号 |
C07C69/708 |
| 代理机构 |
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