| 摘要 |
PROBLEM TO BE SOLVED: To attain easy alignment of a sealing member for sealing a movable portion. SOLUTION: This micro-device manufacturing method includes steps of: forming a first mask pattern around each die on a wafer; etching a first exposed region at a predetermined depth so as to form a step structure configured such that a region outside the die protrudes from the first exposed region; forming a second mask pattern over the whole periphery of a peripheral part in the first exposure region; etching a second exposed region exposed from the second mask pattern so as to form part of the one or more sidewalls; forming a movable part in a cavity surrounded by the sidewalls; aligning the sealing members relative to the step structure such that the sealing member seals the cavity; bonding the aligned sealing members to hermetically seal the cavity. COPYRIGHT: (C)2009,JPO&INPIT
|
