| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure/temperature sensor which is superior in the resistance to environment and is capable of high-accuracy detection of a medium to be measured. SOLUTION: The inside of a pressure/temperature detection chamber 17 constituted of a recession part 2; a metal diaphragm 14; and a weld 15 is provided with a sensor chip 4 for detecting pressure and temperature. Oil 18 is filled in the pressure/temperature detection chamber 17. A metal terminal 8 is connected to the sensor chip 4 and the metal diaphragm 14 or the weld 15, to form a constitution in which the sensor chip 4 is thermally connected to the metal diaphragm 14 or the weld 15 via the metal terminal 8. Since the sensor chip 4 is thermally connected to the metal diaphragm 14 or the weld 15 via the metal terminal 8 by means of such a pressure/temperature sensor, thermal time constant between the sensor chip and the medium to be measured can be reduced, accurate detection of temperature can be carried out, and a constitution which is superior in resistance to the environment can be constituted. COPYRIGHT: (C)2009,JPO&INPIT
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