APPARATUS FOR FIXING PLASTIC SHEET AND FABRICATION METHOD OF NANOPATTERN ON PLASTIC SHEET USING THIS SAME

摘要

An apparatus for fixing plastic sheet and fabrication method of nanopattern on plastic sheet using this same are provided to simplify the manufacturing process of the nano pattern and decrease the manufacturing cost. The apparatus for fixing plastic sheet comprises the chuck(100) for metal guide ring(400) and clipping substrate. The metal guide ring is comprised of the pair. Metal guide rings have a thin shape. Metal guide rings are arranged on the upper side and lower side of the substrate of the thin shape. Metal guide rings are positioned at the edge of the substrate of the thin shape. The chuck for fixing substrate has the ring fixing unit(300) and substrate fixture(200). The chuck for the clipping substrate is arranged under metal guide rings. The ring fixing unit has the same certain person as metal guide rings. The ring fixing unit has a grove along the surface. The ring fixing unit fixes metal guide rings to the chuck. The unit for fixing substrate has the pinhole on the surface. The substrate fixture is surrounded by the ring fixing unit.