| 摘要 |
A chemical reproduction device and a reproduction method is provided to minimize harmful object while reducing material costs by collecting chemical and reusing it without disposal. A collection tank(10) collects chemical discharged from each process of a semiconductor apparatus and perform a first purification of it. A filling tank(20) receives the chemical from the collection tank and performs a second purification of it. A degas chamber degas gas from the purified chemical, and a filter unit removes a foreign material from the chemical from the degas chamber. At this time, a bubble sensor(23) is installed in a filling tank, which senses a bubble state within the filling tank.
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