| 摘要 |
A method of fabricating a micro-electrical-mechanical system (MEMS) microphone array on a substrate comprises the steps of depositing a plurality of respective first and second electrodes 15,17, and depositing a plurality of membranes 16 such that each membrane is mechanically coupled to the respective first electrode, applying a respective sacrificial layer between the each pair of first and second electrodes, and removing the sacrificial layers so as to form a plurality of MEMS structures with respective air gaps 21 between the pairs of first and second electrodes, in which each of the membranes and the first electrodes coupled thereto are able to move relative to the second electrode in response to pressure differences generates sound waves. The array when combined with appropriate signal processing electronics may provide a directionally selective microphone. |
