发明名称 MOLECULAR DRAG PUMPING MECHANISM
摘要 A vacuum pump comprises a housing, a drive shaft supported by a bearing arrangement for rotation relative to the housing about an axis, and a pumping mechanism comprising a stator component mounted on the housing and a disk-shaped rotor component mounted on the drive shaft axially proximate the stator component. The bearing arrangement comprises a bearing supported in both radial and axial directions by a resilient support, comprising inner and outer annular portions connected by a plurality of flexible members, so that there is a fixed relation between the inner race of the bearing and the outer portion of the resilient support to determine the axial clearance between the rotor and stator components of the pumping mechanism.
申请公布号 EP2064449(A1) 申请公布日期 2009.06.03
申请号 EP20070789351 申请日期 2007.07.25
申请人 EDWARDS LIMITED 发明人 TOLLNER, MARTIN, ERNST;SPITTELER, MARK
分类号 F04D17/16;F04D19/04 主分类号 F04D17/16
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