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发明名称
摘要
申请公布号
JP4273533(B2)
申请公布日期
2009.06.03
申请号
JP19980059999
申请日期
1998.03.11
申请人
发明人
分类号
H01L21/265;H01L21/764;H01L21/02;H01L21/302;H01L27/12
主分类号
H01L21/265
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