| 摘要 |
A planar motor and a stage using the same are provided to obtain thrust from x and y direction by arranging the stator of a linear motor above and below of a movable body. A stage apparatus comprises a planar motor including a driving body(10) and a stator, and a reticle or a wafer is mounted on the driving body. The stator operates the driving body in the plane while including a first fix unit and the second stator unit. The driving body is moved to a first direction by a force between the driving body and a first stator unit, and the driving body is moved to a second direction by a force between the driving body and a second stator unit. The first stator unit and the second stator unit are opposite to each other and the driving body is arranged between them.
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