Linear bearing with integrated linear motor

摘要

The guide has an integrated linear motor (3) with a movable part (3.1) connected with a table and a fixed part (3.2) connected with a fixed carrier (1). Magnetic bearings (6) are provided for positioning the table. A position measurement system has a measuring rod (4) and sensing heads (5.1, 5.2), where the system detects a position of the table both in a guiding direction (X) and in a deviation direction (Y) that lies transverse to the guiding direction and parallel to a plane of an air gap of the motor. The bearings are operated so that the table is positioned in the deviation direction.