发明名称 |
PROCESSING METHOD FOR PHOTORESIST MASTER, PRODUCTION METHOD FOR RECORDING MEDIUM-USE MATER, PRODUCTION METHOD FOR RECORDING MEDIUM, PHOTORESIST MASTER, RECORDING MEDIUM-USE MASTER AND RECORDING MEDIUM |
摘要 |
Method of processing photoresist master, comprises irradiating photosensitive layer non-continuously using pulse like laser beam and then developing to form recess and protrusion patterns. Independent claims are also included for the following: (1) a similar method wherein the laser beam duty ratio varies according to the length of the patterns; (2) a similar preparation wherein the protrusion and recess patterns are transferred to the master plate from the photosensitive layer; (3) a similar method comprising a step of forming the pattern corresponding to one pre-pit; (4) a similar method using at least 2 or more pulses of laser beam; (5) a similar method comprising a step of forming pre-pit on the substrate by transferring the patterns from the master disk; (6) the disks obtained; and (7) recording media using the master disk. |
申请公布号 |
EP1492093(A4) |
申请公布日期 |
2009.06.03 |
申请号 |
EP20030710286 |
申请日期 |
2003.03.10 |
申请人 |
TDK CORPORATION |
发明人 |
OYAKE, HISAJI;KATO, TATSUYA;UTSUNOMIYA, HAJIME;SHIBAHARA, MASANORI;YONEYAMA, KENJI |
分类号 |
G11B7/26;B05D3/00;B30B15/06;B32B3/26;G03F7/20;G11B7/0045;G11B7/013 |
主分类号 |
G11B7/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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