| 摘要 |
A substrate processing apparatus is provided to secure maintenance space sufficiently while reducing manufacturing costs by driving a plurality of nozzles with one driving unit. A processing solution supply unit sprays a processing liquid, and a processing liquid supply line is a transfer line where the processing liquid is delivered from a processing liquid storage to a first nozzle(210) and a second nozzle(212). The first nozzle and the second nozzle are installed at a first arm(260) and a second arm respectively, and the first arm and the second arm are connected with a first pivot shaft and a second pivot shaft and are turned by a certain angle from the pivot shafts.
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