| 摘要 |
A substrate carrier transfer apparatus is provided to shorten a transfer time of a substrate carrier by transferring the substrate carrier while moving a multistage slide body. A base(110) is installed into a formation capable of moving to two dimensions. A multistage slide body part(200) is positioned on the base. A carrier supporting part(600) is installed in a top part among the multistage slide body part. The multistage slide body part includes a plurality of slide bodies. Each slide body is moved toward the same direction at the same time. The multistage slide body part includes a bottom slide body(300), a center slide body(400), and a top slide body(500).
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