发明名称 Fabrication method of transparent electrode on visible light-emitting diode
摘要 A method for forming a transparent electrode on a visible light-emitting diode is described. A visible light-emitting diode element is provided, and the visible light-emitting diode element has a substrate, an epitaxial structure and a metal electrode. The metal electrode and the epitaxial structure are located on the same side of the substrate, or located respectively on the different sides of the substrate. An ohmic metal layer is formed on a surface of the epitaxial structure. The ohmic metal layer is annealed. The ohmic metal layer is removed to expose the surface of the epitaxial structure. A transparent electrode layer is formed on the exposed surface. A metal pad is formed on the transparent electrode layer.
申请公布号 US7541205(B2) 申请公布日期 2009.06.02
申请号 US20070684540 申请日期 2007.03.09
申请人 EPISTAR CORPORATION 发明人 YING TSE-LIANG;CHEN SHI-MING
分类号 H01L21/00;H01L33/42 主分类号 H01L21/00
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