发明名称 Wire bond and redistribution layer process
摘要 A manufacturing method of a semiconductor device with a copper redistribution line, a copper inductor and aluminum wire bond pads and the integration of the resulting device with an integrated circuit on a single chip, resulting in the decreased size of the chip.
申请公布号 US7541251(B2) 申请公布日期 2009.06.02
申请号 US20060352418 申请日期 2006.02.10
申请人 CALIFORNIA MICRO DEVICES 发明人 HAMAMOTO MITCHELL M.;CHEN YIOAO;TAN KIM HWEE
分类号 H01L21/20 主分类号 H01L21/20
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