发明名称 Protective layer for a body, and process and arrangement for producing protective layers
摘要 A protective layer having at least one hard-material layer is provided. The hard-material layer is formed from one or more of the following materials metal oxide, metal nitride, metal carbide, metal oxynitride, metal carbonitride, and metal oxycarbonitride. The hard-material layer has laterally closely cohesive, crystalline columns which grow perpendicular to the surface of the body. In some embodiments, the crystalline columns have a lateral dimension which is on average less than 1 mum, preferably less than 200 nm, and which predominantly has crystal orientations which, in the case of columnar growth, have little tendency to widen out, the surface roughness of the hard-material layer having an Ra value of less than 50 nm, preferably less than 20 nm.
申请公布号 US7541102(B2) 申请公布日期 2009.06.02
申请号 US20040936368 申请日期 2004.09.08
申请人 SCHOTT AG 发明人 KLIPPE LUTZ;KRAUSE CORA;DZICK JUERGEN
分类号 B32B9/00;F24C15/10;C03C17/00;C03C17/22;C03C17/245;C03C17/34;C04B41/87;C23C14/02;C23C14/08;C23C14/34;C23C14/46;C23C14/56;C23C16/40;C23C16/56;C23C30/00 主分类号 B32B9/00
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