发明名称 |
Inductively-coupled toroidal plasma source |
摘要 |
Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding. The first AC current and the second AC current induce a combined AC potential inside the plasma chamber that directly forms a toroidal plasma that completes a secondary circuit of the transformer and that dissociates the gas.
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申请公布号 |
US7541558(B2) |
申请公布日期 |
2009.06.02 |
申请号 |
US20060636891 |
申请日期 |
2006.12.11 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
SMITH DONALD K.;CHEN XING;HOLBER WILLIAM M.;GEORGELIS ERIC |
分类号 |
B23K10/00 |
主分类号 |
B23K10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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