APPARATUS AND METHOD FOR NON-CONTACT MEASURING FILM THICKNESS FROM THE SURFACE ROUGHNESS

摘要

A contact-less film measurement system using a surface roughness and a measurement method thereof are provided to measure wet film thickness or dry film thickness in a contact-less method. A contact-less film measurement system comprises an illuminating unit(10) which irradiates the illumination light in the concern surface of the substrate, an image processor(30) which is installed in a computer equipment, a database(40) which is connected to the image processor, and an image analyzer(50) which is connected to the database. The concern surface is taken by a camera. The database comprises a lookup DB(41) and a picturing DB(42).