POLYCRYSTALLINE SILICON MANUFACTURING APPARATUS AND MANUFACTURING METHOD

摘要

An apparatus and a method for manufacturing polycrystalline silicon are provided to stop flow of a gas by closing a valve which is formed in a distribution tube of a gas supply hole around a central part of a reactor. An apparatus for manufacturing polycrystalline silicon includes a plurality of gas supply holes(6A). The gas supply holes spray a source gas toward a top direction in an inner part of a reactor(1). A plurality of silicon seed rods(4) is installed in the reactor. A gas exhaust hole(7) is formed, and exhausts an exhaust gas after reaction. The polycrystalline silicon is formed by supplying the source gas to a surface after heating the silicon seed rod. A gas distribution tube(9) is connected to the gas supply hole. A valve(21) is formed in the gas distribution tube, and opens/closes the gas distribution tube. A valve control part(22) is connected to the valve.