| 摘要 |
A probe card transfer assist apparatus for assisting an operation of transferring a probe card used in an electrical inspection apparatus includes a holder for holding the probe card; a support for supporting the holder in a freely-rotate manner about a point; and an elevation unit for moving the support up and down. Further, an inspection equipment includes an electrical inspection apparatus; and a probe card transfer assist apparatus for assisting an operation of transferring a probe card used in the electrical inspection apparatus, the assist apparatus including a holder for holding the probe card; a support for supporting the holder in a freely-rotating manner about a point; and an elevation unit for moving the support up and down.
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