| 摘要 |
This p-type silicon wafer was subjected to heat treatment to have a resistivity of 10 Omega.cm or more, a BMD density of 5x107 defects/cm3 or more, and an n-type impurity concentration of 1x1014 atoms/cm3 or less at a depth of within 5 mum from a surface of the wafer. This method for heat-treating p-type silicon wafers, the method includes the steps of: loading p-type silicon wafers onto a wafer boat, inserting into a vertical furnace, and holding in an argon gas ambient atmosphere at a temperature of 1100 to 1300° C. for one hour; moving the wafer boat to a transfer chamber and discharging the silicon wafers; and transferring to the wafer boat silicon wafers to be heat treated next, wherein after the discharge of the heat-treated silicon wafers, the silicon wafers to be heat-treated next are transferred to the wafer boat within a waiting time of less than two hours.
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