Method for production of a device for thermal detection of radiation comprising an active microbolometer and a passive microbolometer

摘要

The invention relates to a passive microbolometer (12), comprising a reflective screen (17) and a suspended membrane with the function of radiation absorber, thermometer and electrical connection. The membrane is supported by at least two anchor elements (15) fixed to a support substrate (16). The reflective screen (17) may be embodied by at least one layer (18) of metallic material with a thickness of the order of 500 Å to 2000 Å. The screen (17) is arranged beneath the membrane in electrical contact with the membrane absorber element (13) such as to reduce the area resistance of the unit made up of the screen (17) and the absorbing element (13) and to avoid the absorption of radiation by the latter.