发明名称 Semiconductor device with acceleration sensor
摘要 A semiconductor device includes a package having a cavity in the interior thereof, a support member that extends out from a face of the cavity, and a semiconductor element fixed to the support member without contacting the faces that form the cavity.
申请公布号 US7540190(B2) 申请公布日期 2009.06.02
申请号 US20060531700 申请日期 2006.09.14
申请人 OKI SEMICONDUCTOR CO., LTD. 发明人 SASAKI MAKOTO
分类号 G01P1/02;G01P15/00 主分类号 G01P1/02
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