| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element, capable of contriving the improvement of piezoelectric characteristics, and its manufacturing method. <P>SOLUTION: The piezoelectric element 100 comprises a base 1, a buffer layer 30 and a driving unit 40. The base 1 is equipped with a substrate 10 and a diaphragm 20. The substrate 10 is provided with an opening 12 which becomes a cavity (pressure chamber) for an inkjet type recording head. The diaphragm 20 is provided with a first oscillating layer 22 and a second oscillating layer 24 and is bent by the operation of a driving unit 40. The buffer layer 30 is constituted of a metal of amorphous status. The driving unit 40, formed above the buffer layer 30, is provided with a lower electrode 42, a piezoelectric body layer 44 and an upper electrode 46. The piezoelectric body layer 44 is constituted of a piezoelectric material of perovskite oxide. <P>COPYRIGHT: (C)2009,JPO&INPIT |
