| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which can be compact, and to provide a manufacturing method thereof. SOLUTION: The piezoelectric device includes a lower substrate, an upper substrate and an intermediate substrate held therebetween, wherein the intermediate substrate 10 includes: a piezoelectric vibrating part 11, a frame part 12 surrounding the piezoelectric vibrating part; connecting parts 15a, 15b for connecting the piezoelectric vibrating part and the frame part; a first exciting electrode 13 provided on an upper surface of the piezoelectric vibrating part; a second exciting electrode 14 provided on a lower surface of the piezoelectric vibrating part; first wiring 23 electrically connected with the first exciting electrode; and second wiring 33 electrically connected with the second exciting electrode. The first, second wiring are formed to reach an upper surface 17a, 17c and a lower surface 17b, 17d of the frame part from an inner side surface connecting the upper surface and the lower surface of the frame part. COPYRIGHT: (C)2009,JPO&INPIT
|
