| 摘要 |
PROBLEM TO BE SOLVED: To provide a backside incident type linear image sensor capable of decreasing cross talk, a driving method of the linear image sensor, and its manufacturing method. SOLUTION: A high-speed transfer part 60 is formed between a light receiving part 50 at the surface side of a substrate and a horizontal transfer part 70, and a mechanism for independently discharging a noise charge generated at the high-speed transfer part is provided. Boundaries 10, 11 of the light incident region formed at the backside of the substrate are formed at a place facing the high-speed transfer part. COPYRIGHT: (C)2009,JPO&INPIT
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