| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump device capable of considerably reducing power consumption under a condition that vacuum is comparatively high. SOLUTION: In the vacuum pump device where an intake port and an exhaust port are spatially communicated with each other, A plurality of pumps with different exhaust speeds are arranged in parallel between the intake port and the exhaust port. Driving of a plurality of the pumps is controlled so that pumping is performed by using a pump with lower exhaust speed when load of the device is lower. COPYRIGHT: (C)2009,JPO&INPIT
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