发明名称 |
Method and Computer Program Product for Wafer Manufacturing Process Abnormalities Detection |
摘要 |
A method for wafer manufacturing process abnormalities detection, the method includes: generating a classifier in response to compression based similarities between relevant wafer manufacturing process information of pairs of wafers; and utilizing the classifier to detect wafer manufacturing process abnormalities.
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申请公布号 |
US2009137068(A1) |
申请公布日期 |
2009.05.28 |
申请号 |
US20070946064 |
申请日期 |
2007.11.28 |
申请人 |
ROSEN-ZVI MICHAL;WONG JUSTIN WAI-CHOW;XU YIHENG;YOM-TOV ELAD |
发明人 |
ROSEN-ZVI MICHAL;WONG JUSTIN WAI-CHOW;XU YIHENG;YOM-TOV ELAD |
分类号 |
H01L21/66;G06F17/50 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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