| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern inspecting apparatus capable of correcting the curvature of a tape carrier for the mounting of electronic components in the direction of the width, without having to provide a large-scale drive mechanism or imaging wiring patterns by reflected light, as well as, wiring patterns by transmitted light. SOLUTION: The pattern inspecting apparatus for optically acquiring and inspecting the shape of wiring patterns formed in the tape carrier for the mounting of electronic components is provided with a drum body 8 that holds the tape carrier 5 in a curved state and sequentially arranging the wiring patterns formed in the tape carrier 5 in an imaging region of a line sensor. An illumination means 14 is provided for the inside of the drum body 8. The light emitted from the illumination means 14 and transmitted through the tape carrier 5 is imaged by the line sensor arranged outside the drum body 8. COPYRIGHT: (C)2009,JPO&INPIT
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