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发明名称
High Q and low stress capacitor electrode array
摘要
An embodiment of the present invention provides a method, comprising breaking an electrode into subsections with signal bus lines connecting said subsections and a solid electrode to improve Q.
申请公布号
US2009135544(A1)
申请公布日期
2009.05.28
申请号
US20090321897
申请日期
2009.01.27
申请人
发明人
MARTIN JAMES
分类号
H01G4/005
主分类号
H01G4/005
代理机构
代理人
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