| 摘要 |
<p>A glass surface for a spatial light modulator array has on at least one side an antireflective coating (14) and an opaque coating (12,30), the opaque coating having at least two layers and a photopic reflectance of less than 10%. Also claimed is a method for forming an opaque low reflectance coating on a glass surface comprising depositing the layers; and pattern etching the opaque coating to define light transmission aperture areas. Preferred opaque coatings are formed of three layers of Y oxide, graphite and C, or two layers of Y oxide and Ge or C and graphite.</p> |
