| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce the intrusion of a contaminant in a gate evacuation room, and to reduce the adhesion of the contaminant from an open state to a closed state and from the closed state to the open state of a gate including a time of evacuation and closed movement. <P>SOLUTION: A shutter closes an inlet when a gate is accommodated in a gate evacuation room and a shutter moves a shutter moving room to bring a shutter seal portion into contact with a fixed seal portion, and closes an inlet when the gate moves a shutter moving room to bring a first gate seal portion into contact with a fixed seal portion, thus closing an exhaust opening , and the shutter moves the shutter moving room to bring the shutter seal portion into contact with a second gate seal portion. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
