| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique of shortening a TAT of analysis and reducing a burden of an operator by making association of an access to a probing object and a coordinate on layout data easy, in failure analysis of a semiconductor device. SOLUTION: In confirmation of a probing position on an SEM image of real time, after carrying out coordinate system locking to correspond a coordinate system on an SEM image side and a coordinate system on a layout image side, the information specifying the probing position on a layout coordinate system side is displayed on the SEM image side, and, with it as a mark, the analysis system is configured so as to carry out the probing operation. COPYRIGHT: (C)2009,JPO&INPIT
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