| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting method which neither uses an expensive cutting tool, nor requires high speed travel or high speed rotation of the cutting tool, performs multi-cutting, sets no limitation to the size of an object to be cut, has a very small cutting processing margin, and finishes a cut face smoothly. SOLUTION: The steel wire 2 is continuously fed from one supply reel 3, this steel wire 2 is put into contact with the single crystalline SiC ingot 10 after having been dipped in the Fenton treatment liquid 5 in the Fenton reaction tank 1, the single crystalline SiC ingot 10 is etched by hydroxy radicals generated by the Fenton reaction of ferrous ions derived from the iron component of the steel wire 2 and hydrogen peroxide in the Fenton treatment liquid 5, main rollers 6, 7 are slowly moved downward in matching with the etching speed, and, after the single crystalline SiC ingot 10 has been cut by the descending steel wire 2, the steel wire 2 is wound around the other winding reel 9. COPYRIGHT: (C)2009,JPO&INPIT
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