发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
摘要 A method for fabricating a semiconductor device is provided. A first active region and a second active region are defined in a substrate. An electrode covering the first active region and the second active region is formed on the substrate. A first sacrificial layer is formed on the second active layer. A first work function electrode is formed on the first active layer by performing a first doping process to a portion of the electrode. The first sacrificial layer is removed. A second sacrificial layer is formed on the first active layer.
申请公布号 US2009137090(A1) 申请公布日期 2009.05.28
申请号 US20080139426 申请日期 2008.06.13
申请人 INOTERA MEMORIES, INC. 发明人 CHEN WEN-HSIANG;HSU CHENG-YEH
分类号 H01L21/8236 主分类号 H01L21/8236
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