SURFACE ACOUSTIC WAVE ELEMENT AND EQUIPMENT FOR MEASURING CHARACTERISTICS OF LIQUID MATERIAL

摘要

A surface acoustic wave element and equipment for measuring the physical characteristics of a liquid material without causing short-circuit of an input electrode and an output electrode even if the element or the equipment is immersed into the liquid material of measurement object. The first surface acoustic wave element (10) has input electrodes (12, 22) surrounded by a sealing member (30a) having a circumferential wall (32a) formed on a piezoelectric substrate (54), and a top plate (34a) covering the circumferential wall (32a), and a sealing reinforcement (40a) is formed on the piezoelectric substrate (54) in parallel with a wall (42a) to face a material (52), which is to be measured and loaded on the piezoelectric substrate (54). The output electrodes (14, 24) are surrounded by a sealing member (30b) having a circumferential wall (32b) formed of photosensitive resin on the piezoelectric substrate (54), and a top plate (34b) covering the circumferential wall (32b), and a sealing reinforcement (40b) is formed on the piezoelectric substrate (54) in parallel with a wall (42b) to face the material (52), which is to be measured and loaded on the piezoelectric substrate (54).