| 摘要 |
PROBLEM TO BE SOLVED: To provide a focusing arrangement enabling preferable focusing, and a microscope apparatus having it. SOLUTION: The arrangement includes: a first detecting means for producing a first defocusing signal showing displacement of the focal position of an objective lens and an imaging position of a transmission object; a determination means for determining whether focusing is executed for a desired surface out of a plurality of reflection surfaces based on an output signal of the focus sensing light receiving element and the reference position by preliminarily storing a reference position on a focus sensing light receiving element for equally dividing the light receiving amount of the pattern image at the time of being focused in the lateral displacement direction of a pattern image for at least one reflection surface out of a plurality of reflection surfaces, and an adjusting means for monitoring a first evaluation value showing goodness/badness of the first defocusing signal and adjusting the interval between the objective lens and the transmission object based on the first defocusing signal in the case where the determination means determines that the evaluation value exceeds a first threshold value and that the focusing operation is carried out to the desired surface. COPYRIGHT: (C)2009,JPO&INPIT |
