发明名称 |
A TRANSISTOR AND A METHOD OF MANUFACTURING THE SAME |
摘要 |
A method of manufacturing a transistor (400), the method comprising forming a gate (101) on a substrate (102), forming a spacer (201) on lateral side walls of the gate (101) and on an adjacent portion (202) of the substrate (102), rearranging material of the spacer (201) so that the rearranged spacer (301) covers only a lower portion (303) of the lateral side walls of the gate (101) and an increased portion (302) of the substrate (102), and providing source/drain regions (402, 403) in a portion of the substrate (102) below the rearranged spacer (301). |
申请公布号 |
WO2009031076(A3) |
申请公布日期 |
2009.05.28 |
申请号 |
WO2008IB53448 |
申请日期 |
2008.08.27 |
申请人 |
NXP B.V.;HERINGA, ANCO;MEUNIER-BEILLARD, PHILIPPE;DUFFY, RAYMOND |
发明人 |
HERINGA, ANCO;MEUNIER-BEILLARD, PHILIPPE;DUFFY, RAYMOND |
分类号 |
H01L21/266;H01L21/265;H01L21/336;H01L29/08 |
主分类号 |
H01L21/266 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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