ULTRAVIOLET RAY IRRADIATION PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an ultraviolet ray irradiation processing device preventing undesired discharge between an excimer lamp and a processed object without damaging the processed object. SOLUTION: The ultraviolet ray irradiation processing device includes the excimer lamp having a flat cylindrical discharge vessel with a curved part in the corner. The creeping discharge distance between a high-voltage electrode and a ground electrode is set shorter than the minimum discharge distance between the high-voltage electrode and the processed object. COPYRIGHT: (C)2009,JPO&INPIT