发明名称 |
METHOD AND APPARATUS FOR PRODUCING PHOTOCATALYST |
摘要 |
A method of producing a photocatalyst according to the invention comprises forming an amorphous titanium oxide and heat-treating it in an atmosphere containing oxygen, whereby a photocatalyst having a good photocatalysis can be obtained. In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate. This apparatus can be provided with cooling means to allow enhancement of the throughput of the film formation process.
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申请公布号 |
US2009134022(A1) |
申请公布日期 |
2009.05.28 |
申请号 |
US20080274462 |
申请日期 |
2008.11.20 |
申请人 |
SHIBAURA MECHATRONICS CORPORATION |
发明人 |
HIRAOKA JUNJI;TAKASHIO MINORU;FUKUSHIMA TETSUYA;NOGUCHI DAISUKE;KAWAMATA YOSHIO |
分类号 |
C23C14/34;B01J21/06;B01J35/00;B01J37/34;C23C14/08;C23C14/54;C23C14/58 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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