| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrapure water production system where UV is securely emitted to TOC (total organic carbon) concentration in inflow water by the right amount, thus TOC is securely oxidized and decomposed away, further, the increase of DO (dissolved oxygen) is prevented, and ultrapure water of low TOC and low DO can be stably produced. SOLUTION: An ultrapure water production system 1 including: an ultraviolet ray oxidizing means 2 decomposing a TOC component in treatment water; and an ion exchange tower 3 removing the TOC component decomposed by the ultraviolet ray oxidizing means 2, has a peroxide concentration measuring means 4 measuring the concentration of peroxide in outlet water in the ultraviolet ray oxidizing means 2; and an ultraviolet ray irradiation amount controlling means 5 controlling an ultraviolet ray irradiation amount in the ultraviolet ray oxidizing means 2 according to the measured result from the peroxide concentration measuring means 4. COPYRIGHT: (C)2009,JPO&INPIT |
