MINUTE MOLDING DIE MATERIAL CONSISTING OF VITREOUS CARBON MATERIAL, METHOD FOR MANUFACTURING THE SAME AND MINUTE MOLDING DIE MADE WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a minute molding die material consisting of a vitreous carbon material, from which a minute molding die for micro/nano-level precision processing is formed without applying a fluorine-based coating material to the minute molding die or without coating the minute molding die with DLC (diamond-like carbon) or the like and which has excellent mold releasability. SOLUTION: The vitreous carbon material is heat-treated at 2,100-3,000°C to obtain the minute molding die material having a self-lubricating/releasing property. The minute molding die is formed from the obtained minute molding die material. COPYRIGHT: (C)2009,JPO&INPIT